INVAC Systems
specializes in the design and
manufacture of vacuum end cap flanges for
Quartz, SiC, or Alumina tubes for the Semiconductor, Solar, and MEM's
Industries.
We offer water cooled vacuum flanges, or
non-cooled flanges for low temperature applications.
INVAC Systems
continuously works with
Labs, Universities, and large scale Semiconductor Productions
facilities to produce flanges for atmospheric and vacuum
applications to seal tubes from 50mm to 420mm.
Furthermore, we provide full leak check and orbital micro welding services, design and fabrication of gas panels,
process modifications, equipment wafer size upgrades and other
retrofits.
Custom Flange Tabs
Custom Back Plates
Custom Adapters